Laser beam irradiation apparatus and manufacturing method of organic light emitting display apparatus using the same

摘要

A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming an auxiliary electrode; forming a pixel defining layer having an opening which exposes some of the auxiliary electrode; forming an intermediate layer on the auxiliary electrode; irradiating a laser beam toward the intermediate layer by using a laser beam irradiation apparatus, such that a contact hole is formed through the intermediate layer; and forming a cathode electrode on the intermediate layer and in the contact hole, such that the cathode electrode contacts the auxiliary electrode through the contact hole, wherein the laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser light source, a first optical system for adjusting a shape of light emitted from the controller, a scanner that adjusts a direction of light emitted from the first optical system, and an F-theta lens for reducing a beam emitted from the scanner.