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发明名称
摘要
申请公布号
JPS4929096(B1)
申请公布日期
1974.08.01
申请号
JP19700023138
申请日期
1970.03.20
申请人
发明人
分类号
C30B19/00;C30B29/40;C30B29/44;H01L21/208
主分类号
C30B19/00
代理机构
代理人
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