Microelectromechanical gyroscope with rotary driving motion and improved electrical properties

摘要

An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

主权项

1. A device, comprising:
a substrate; a rectangular frame formed on the substrate, a first side of the frame extending along a first axis and a second side of the frame extending along a second axis that is orthogonal to the first axis; a driving assembly elastically coupled to the substrate and positioned within the frame, at least a portion of the driving assembly being configured to move in a plane; a first pair of sensing masses coupled to the driving assembly and positioned within the frame, the first pair of sensing masses aligned with each other along a third axis, the third axis being transverse to the first axis, the first pair of sensing masses being configured to move out of the plane to generate a first signal indicative of rotation about the first axis and rotation about the second axis; a second pair of sensing masses coupled to the driving assembly, the second pair of sensing masses aligned with each other along a fourth axis, and the fourth axis being orthogonal to the third axis, the second pair of sensing masses being configured to move out of the plane to generate a second signal indicative of rotation about the first axis and rotation about the second axis; and a read circuit coupled to the first pair of sensing masses and the second pair of sensing masses, the read circuit configured to detect rotation about the first axis based on the first and second signals from the first pair of sensing masses and the second pair of sensing masses, respectively.