This disclosure relates to a photosensitive composition that includes at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 20,000 Daltons to about 70,000 Daltons; at least one solubility switching compound; at least one photoinitiator; and at least one solvent. The composition is capable of forming a film or a dry film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
申请公布号
WO2016172092(A1)
申请公布日期
2016.10.27
申请号
WO2016US28262
申请日期
2016.04.19
申请人
FUJIFILM ELECTRONIC MATERIALS U.S.A., INC.
发明人
MALIK, Sanjay;SAKAMURI, Raj;DIMOV, Ognian N.;DE, Binod B.;REINERTH, William A.;NAIINI, Ahmad A.