发明名称 Particle and method for manufacturing same
摘要 Manufacturing a particle may include inserting a supporting body into a receiving groove on a first substrate to accommodate a first surface of the supporting body into the receiving groove and to expose a second surface of the supporting body to outside; forming a first coating layer on the second surface; attaching a second substrate to the supporting body on which the first coating layer is formed; exposing the first surface of the supporting body on which the first coating layer is formed to outside, by separating the supporting body on which the first coating layer is formed and which is attached to the second substrate from the first substrate; forming a second coating layer on the first surface of the supporting body; and separating the supporting body, on which the first coating layer and the second coating layer are formed, from the second substrate.
申请公布号 US9514936(B2) 申请公布日期 2016.12.06
申请号 US201213570625 申请日期 2012.08.09
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY 发明人 Yoon Kyung Byung;Son Phil Kook;Park Hye Ryeong
分类号 H01L21/02 主分类号 H01L21/02
代理机构 Brundidge & Stanger, P.C. 代理人 Brundidge & Stanger, P.C.
主权项 1. A method for manufacturing particles, comprising: inserting supporting bodies into receiving grooves on a first substrate to accommodate a first surface of each of the supporting bodies into each of the receiving grooves and to expose a second surface of each of the supporting bodies to outside; forming a first coating layer on the second surface; attaching a second substrate to the supporting bodies on which the first coating layer is formed; exposing the first surface of each of the supporting bodies on which the first coating layer is formed by separating the supporting bodies on which the first coating layer is formed and which is attached to the second substrate from the first substrate; forming a second coating layer on the first surface of each of the supporting bodies; separating the supporting bodies, on which the first coating layer and the second coating layer are formed, from the second substrate, wherein the combination of the first coating layer and the second coating layer is coated on the whole surface of each of the supporting bodies; and removing a projecting coating layer that connects the supporting bodies, the projecting coating layer comprising the first coating layer and the second coating layer which have been formed directly onto the first substrate and the second substrate; and making the first coating layer and the second coating layer uniform, wherein the inserting the supporting bodies into the receiving grooves includes dispersing the supporting bodies on the first substrate and applying physical pressure thereon by rubbing or pressing against the first substrate.
地址 Seoul KR