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发明名称
HANDOTAIZAIRYONO MURUTSUBOTAIYOJUSOCHI
摘要
申请公布号
JPS513776(A)
申请公布日期
1976.01.13
申请号
JP19740073809
申请日期
1974.06.29
申请人
TOKYO SHIBAURA ELECTRIC CO LTD
发明人
KATO SATOSHI;KOBAYASHI MASAAKI;WATANABE MASAHARU
分类号
C30B13/26;C30B13/32;H01L21/208
主分类号
C30B13/26
代理机构
代理人
主权项
地址
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