发明名称 APPARATUS AND METHOD FOR MAKING MULTI-LAYER EPITAXIAL GROWTH DEVICES
摘要 <p>In the manufacturing of a multiple layer semiconductor device, such as semiconductor laser device formed by liquid phase epitaxial growth, the following improvement is offered, that is, after forming a first epitaxial growth layer by making a semiconductor substrate contact a first semiconductor solution, and prior to forming a second epitaxial growth layer by letting said first layer contact with a second semiconductor solution, said first layer is made to contact a third semiconductor solution or liquid metal, whereby the slope of impurity concentration in the vicinity of a junction formed between the first and the second layer can be satisfactorily steepened thereby attaining a good performance.</p>
申请公布号 CA987795(A) 申请公布日期 1976.04.20
申请号 CA19730177297 申请日期 1973.07.25
申请人 MATSUSHITA ELECTRONICS CORPORATION 发明人 ITOH, KUNIO;INOUE, MORIO
分类号 C30B19/06;C30B19/10;H01L21/208 主分类号 C30B19/06
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