发明名称 SEMICONDUCTOR OPTICAL ELEMENT AND METHOD FOR MANUFACTURING SAME
摘要 In order to provide a semiconductor optical element having excellent characteristics even if the semiconductor optical element is a Ge optical element formed on a Si oxide film, this semiconductor optical element is provided with a semiconductor substrate 101, an insulating film 102, an n-type or undoped single crystal Ge layer 104, and p-type extraction electrodes 105, 106, which are formed on the side surface of the n-type or undoped single crystal Ge layer. The p-type extraction electrodes 105, 106 have an electrode section and a wiring section, and the upper surface of the electrode section is at a height equal to that of the upper surface of the n-type or undoped single crystal Ge layer 104, and is higher than the upper surface of the wiring section.
申请公布号 WO2016151759(A1) 申请公布日期 2016.09.29
申请号 WO2015JP58911 申请日期 2015.03.24
申请人 HITACHI, LTD. 发明人 ODA Katsuya
分类号 H01S5/32;G02B6/12;G02B6/13;G02B6/42;H01L31/10;H01L31/12;H01S5/026;H01S5/12 主分类号 H01S5/32
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