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发明名称
TANKAKEISOHIMAKUKEISEIHOHO
摘要
申请公布号
JPS5170191(A)
申请公布日期
1976.06.17
申请号
JP19740144784
申请日期
1974.12.16
申请人
IBIGAWA DENKI KOGYO KK
发明人
HARA KAZUHISA
分类号
C04B41/87;H01L21/22
主分类号
C04B41/87
代理机构
代理人
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地址
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