发明名称 GRAPHENE, ELECTRONIC ELEMENT, AND METHOD FOR MANUFACTURING SAME
摘要 In the present invention, in a first step, a product nucleus for a carbon six-membered ring is formed on the principal surface of a substrate, and then, in a second step, a metal such as gallium having a melting point of 400°C or less and having catalytic activity for synthesizing graphene is brought into contact with the principal surface of the substrate on which the product nucleus is formed, a gas containing a hydrocarbon is supplied thereto in a state in which the metal is maintained at a temperature exceeding the melting point, and a graphene is grown at the interface of contact of the substrate principal surface with the metal. The starting material gas in the present invention decomposes into hydrogen and carbon at the surface of the liquid metal even at an extremely low temperature of about 100°C, and bonds with the gallium atoms or other atoms on the surface of the liquid metal. Carbon atoms readily diffuse through the surface of the liquid metal in a state of being led to the gallium atoms or other atoms, and carbon is rapidly supplied to the interface of contact with the substrate principal surface.
申请公布号 WO2016175195(A1) 申请公布日期 2016.11.03
申请号 WO2016JP63014 申请日期 2016.04.26
申请人 UNIVERSITY OF TSUKUBA 发明人 FUJITA, Jun-ichi;MURAKAMI, Katsuhisa
分类号 C01B31/02;H01L29/12;H01L51/05;H01L51/30;H01L51/40 主分类号 C01B31/02
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