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发明名称
VERFAHREN UND VORRICHTUNG ZUM BETRIEB EINER TITANVERDAMPFERPUMPE
摘要
申请公布号
DE2548302(A1)
申请公布日期
1977.05.05
申请号
DE19752548302
申请日期
1975.10.29
申请人
LEYBOLD-HERAEUS GMBH & CO KG
发明人
KABELITZ,HANS-PETER,DR.;FLOSBACH,RUDOLF;HONRATH,MATHIAS
分类号
F04B37/02;F04B37/06;(IPC1-7):H01J41/12
主分类号
F04B37/02
代理机构
代理人
主权项
地址
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