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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5260581(A)
申请公布日期
1977.05.19
申请号
JP19750136341
申请日期
1975.11.14
申请人
KOGYO GIJUTSUIN *JAPAN*
发明人
HAYASHI YUTAKA
分类号
H01L21/822;H01L21/76;H01L27/04
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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