发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PURPOSE:To obtain a memory device of high injection efficiency and high reliability by providing charge capturing regions through an insulating film on the surface of the recesses formed in channel regions.
申请公布号 JPS52115669(A) 申请公布日期 1977.09.28
申请号 JP19760031930 申请日期 1976.03.25
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 MASUOKA FUJIO
分类号 H01L21/8247;H01L29/788;H01L29/792 主分类号 H01L21/8247
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