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发明名称
THIN FILM FORMING METHOD
摘要
申请公布号
JPS52130284(A)
申请公布日期
1977.11.01
申请号
JP19760046581
申请日期
1976.04.26
申请人
HITACHI LTD
发明人
HONMA YOSHIO;NOZAWA HARUO;HARADA TADAYOSHI;KACHI TADAO
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
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地址
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