发明名称 CHARGED PARTICLE ANALYZER
摘要 PURPOSE:To accomplish the signal detection with a single detector to simplify the signal processing system by guiding the secondary electrons, which are obthained from a mass spectrometer and have been subjected to the mass analysis, into a secondary electron multiplier of cylindrical shape and by converting them into secondary electrons.
申请公布号 JPS531594(A) 申请公布日期 1978.01.09
申请号 JP19760075560 申请日期 1976.06.28
申请人 HITACHI LTD 发明人 ISHIKAWA KIYOSHI;GOTOU SUMITAKA
分类号 G01N23/227;H01J37/244;H01J49/44 主分类号 G01N23/227
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