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发明名称
VERFAHREN ZUR STEUERUNG DER DOTIERSTOFFKONZENTRATION IN EPITAKTISCH AUFWACHSENDEN HALBLEITERSCHICHTEN
摘要
申请公布号
DE2409085(B2)
申请公布日期
1978.02.23
申请号
DE19742409085
申请日期
1974.02.26
申请人
发明人
分类号
C30B23/00;(IPC1-7):B01J17/32
主分类号
C30B23/00
代理机构
代理人
主权项
地址
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