VERFAHREN UND VORRICHTUNG ZUM AUTOMATISCHEN AUFHEIZEN UND EINSTELLEN EINER BEHANDLUNGSTEMPERATUR

摘要

An apparatus for controlling the treatment temperature of a workpiece processed in a current intensive glow discharge container, comprises a differentiator for deriving at its output a time derivative of the actual treatment temperature in the glow discharge container, a comparator for generating a control value corresponding to the difference between the time derivative and a preset desired value, and a current regulator controlled by the control value at the output of the comparator.