| 发明名称 |
ELECTRON LINE RESIST |
| 摘要 |
PURPOSE:To obtain a resist featuring a high resolution, anti-etching performance and a high sensitivity, by using a copolymer of unsaturated organic compound. |
| 申请公布号 |
JPS5349956(A) |
申请公布日期 |
1978.05.06 |
| 申请号 |
JP19760125319 |
申请日期 |
1976.10.18 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TAKEYAMA KENICHI;HIBINO KUNIO |
| 分类号 |
G03F7/039;G03C1/00;H01L21/027;H01L21/312 |
主分类号 |
G03F7/039 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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