THERMAL RADIATION MICROSENSOR COMPRISING THERMOELECTRIC MICRO PILLARS

摘要

A thermal radiation microsensor can comprise thermoelectric micro pillars, in which multiple vertically standing thermoelectric micro pillars can act as thermoelectric pairs and mechanical support of an absorption layer. Radiation absorbed by the absorption layer can produce a temperature difference, which drives the thermocouple comprising p-type and n-type micro pillars to output a voltage. Multiple thermocouples can be connected in series to improve the signal output.

主权项

1. An apparatus, comprising:
an insulating layer disposed on a substrate; a thermoelectric layer on the insulating layer, wherein the thermoelectric layer comprises:
n-type pillars formed from an n-type region, andp-type pillars formed from a p-type region, wherein each pillar is monolithically integrated with a flat base; a first metal layer connecting first tops of the n-type pillars to second tops of the p-type pillars; a second metal layer connecting first bottom bases of the n-type pillars to second bottom bases of p-type pillars; a support layer, wherein the support layer stabilizes the first metal layer and the first tops and the second tops; and a heat generating layer, wherein the heat generating layer generates heat when being exposed to thermal radiation.