发明名称 |
NONVOLATILE MEMORY DEVICE USING TWO-DIMENSIONAL MATERIAL AND METHOD OF MANUFACTURING THE SAME |
摘要 |
Example embodiments relate to nonvolatile memory devices using a 2D material, and methods of manufacturing the nonvolatile memory device. The nonvolatile memory device includes a channel layer formed on a substrate, a gate stack that includes a gate electrode, source and drain electrodes. The channel layer has a threshold voltage greater than that of a graphene layer, and the gate stack includes a 2D material floating gate that is not in contact with the channel layer. The channel layer includes first and second material layers and a first barrier layer disposed between the first and second material layers, and the first and second material layers may contact the first barrier layer. |
申请公布号 |
US2016336439(A1) |
申请公布日期 |
2016.11.17 |
申请号 |
US201615015307 |
申请日期 |
2016.02.04 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
LEE Jaeho;Heo Jinseong;Park Seongjun |
分类号 |
H01L29/788;H01L29/49;H01L29/16;H01L29/24;H01L29/786;H01L29/165 |
主分类号 |
H01L29/788 |
代理机构 |
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代理人 |
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主权项 |
1. A nonvolatile memory device comprising:
a substrate; a channel layer on the substrate; a gate stack on the channel layer, the gate stack including a gate electrode; a source electrode on the channel layer; and a drain electrode on the channel layer, wherein the channel layer has a threshold voltage that is greater than a threshold voltage of a graphene layer, and the gate stack includes a 2D material floating gate, and the 2D material floating gate does not contact the channel layer. |
地址 |
Suwon-si KR |