Photoacoustic gas sensor device and a method for analyzing gas

摘要

A photoacoustic gas sensor device for analyzing gas includes an emitter module and a pressure-sensitive module. The emitter module is arranged on a carrier substrate and emits light pulses. The pressure-sensitive module is arranged on the carrier substrate within a reference gas volume. The reference gas volume is separated from a volume intended to be filled with a gas to be analyzed. Further, the pressure-sensitive module generates a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume. Additionally, the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed.

主权项

1. A photoacoustic gas sensor device for analyzing gas comprising:
an emitter module arranged on a carrier substrate and configured to emit light pulses; and a pressure sensitive module arranged on the carrier substrate within a reference gas volume, wherein the reference gas volume is separated from a volume intended to be filled with a gas to be analyzed, wherein the pressure sensitive module is configured to generate a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume, wherein the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed, wherein the pressure sensitive module comprises at least a membrane configured to be moved by the acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume, wherein the membrane is arranged so that a reference gas within the reference gas volume surrounds the membrane during analyzing gas, wherein the emitter module and the pressure sensitive module are arranged so that at least a volume located at one side of the membrane cannot be reached by light pulses emitted by the emitter module or less than 1% of the light pulses emitted by the emitter module is able to reach die volume located at the one side of the membrane.