| 摘要 |
PURPOSE:To miniaturize the oscillator by making use of the electrostrictive effect of the silicon dioxide. CONSTITUTION:Oscillator 3, support part 2 and support frame 1 are made of the silicon dioxide, and the silicon dioxide is formed on the silicon single-crystal through the vapor chemical growing method and others. With application of the voltage between electrode 4A and 4B, the distortion is caused to oscillator 5 due to the electrostrictive effect. As a result, the flexion oscillation can be excited in the plate thickness direction. |
