ION PLASMA COATING APPARATUS,申请号JP19780005111-传众专利搜索

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发明名称	ION PLASMA COATING APPARATUS
摘要
申请公布号	JPS5497587(A)	申请公布日期	1979.08.01
申请号	JP19780005111	申请日期	1978.01.20
申请人	GEORUGII AREKUSANDOROUITSUCHI;YURI PIYOOTOROUITSUCHI MAISHIE;BORISU AREKUSEEEUITSUCHI EGORO;YURII AKIMOUITSUCHI DOMITORIEF	发明人	GEORUGII AREKUSANDOROUITSUCHI;YURII PIYOOTOROUITSUCHI MAISHI;BORISU AREKUSEEEUITSUCHI EGORO;YURII AKIMOUITSUCHI DOMITORIEF
分类号	H01J37/317;C23C14/42;H01J37/30	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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