| 摘要 |
PURPOSE:To prevent the uneveness of thickness of covering film based on the difference of covering velocity and to carry out mass production of super hard alloy products, by alternately converting each side of inhalation and exhausting of reaction vessel carrying out covering reaction and changing flowing direction of raw material gas. CONSTITUTION:CH4 and H2 gas regulated flowing amount by the flowmeter 41, 42, are passed through the TiCl4 evaporator 44 maintained at a fixed temperature by the water bath 43 and a fixed rate of TiCl4 is saturated. Next, the above mixed gas is induced to the reaction vessel 46 from the inhalation and exhausting opening P through the three way cock X and is discharged from the inhalation and exhausting opening Q after covering TiC on the super hard alloy and then, is sent to the cold trap 47 through the three way cock Y. Then, the reaction gas passed through the evaporator 44, is induced from the opening Q and is discharged from the opening P by regulating the cock X, Y after elapsning a fixed time and then, is sent to the trap 47. That is, uniform covering film is able to provide against all super hard alloy in the vessel 46 keeping reaction temperature at constant, by changing flow of reaction gas in the vessel 46. |
