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发明名称
DETECTING ORGANIC CONTAMINANTS
摘要
申请公布号
GB1553804(A)
申请公布日期
1979.10.10
申请号
GB19770052713
申请日期
1977.12.19
申请人
IBM CORP
发明人
分类号
G01N21/64;H01L21/027;H01L21/66;(IPC1-7):G01N21/52
主分类号
G01N21/64
代理机构
代理人
主权项
地址
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