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发明名称
SEMICONDUCTOR OXIDATION UNIT
摘要
申请公布号
JPS54134979(A)
申请公布日期
1979.10.19
申请号
JP19780043457
申请日期
1978.04.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUBOUCHI NATSUO;ABE HARUHIKO;NISHIMOTO AKIRA;MIYOSHI HIROKAZU
分类号
H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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