| 摘要 |
PURPOSE:To enable to adjust the center frequency of the surface acoustic wave element lower, by providing the inter-digital electrode on the surface of the piezoelectric substrate and providing the etching surface on the surface of piezoelectric substance at the surface wave propagation path by this electrode. CONSTITUTION:The surface acoustic wave element is constituted by forming the inter-digital electrode 4 on the surface of the piezoelectric substrate 1. Etching is made on the substrate surface 5 exposed between electrode chips 4, and the center frequency of element can be adjusted lower by changing the amount of etching. By combinating it with the means in which the surface 6 of the electrode 4 is etched to adjust higher frequency, the frequency can be adjusted in extremely accurate method. It is effective to use dry etching for the selctive etching between the electrode metal 4 and the substrate 1. |
