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发明名称
VACUUM PLANTS
摘要
申请公布号
GB1562350(A)
申请公布日期
1980.03.12
申请号
GB19770016186
申请日期
1977.04.19
申请人
BALZERS AG FUER HOCHVAKUUMTECHNIK UND DUENNE SCHICHTEN
发明人
分类号
B01J3/00;C23C14/56;(IPC1-7):C23C13/08
主分类号
B01J3/00
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