| 摘要 |
This diaphragm actuator for driving an operation rod in an axial direction is configured to include: a diaphragm coupled with the operation rod; a high pressure chamber adjacent to one end, in the axial direction, of the diaphragm; a low pressure chamber adjacent to the other end, in the axial direction, of the diaphragm; and a return spring which is provided in the low pressure chamber and which pushes the diaphragm toward the high pressure chamber. An absorbing part is placed inside the high pressure chamber, and when the diaphragm moves toward the high pressure chamber side and stops, the absorbing part absorbs a force applied on the diaphragm. |
