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发明名称
METHOD OF SEALING SUBSTRATE CARRYING SPECIAL ELEMENT BY METALLIC CAP
摘要
申请公布号
JPS5562752(A)
申请公布日期
1980.05.12
申请号
JP19780133706
申请日期
1978.11.01
申请人
HITACHI LTD
发明人
NIIZAKI SHINYA;NAGAYAMA HITOMI
分类号
H01L23/02
主分类号
H01L23/02
代理机构
代理人
主权项
地址
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