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经营范围
发明名称
PELLET SELECTOR
摘要
申请公布号
JPS55110054(A)
申请公布日期
1980.08.25
申请号
JP19790016135
申请日期
1979.02.16
申请人
HITACHI LTD
发明人
NISHIYAMA TATSUO
分类号
G01R31/26;H01L21/50;H01L21/66;H01L21/68
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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