| 摘要 |
PURPOSE:To obtain a carbon film of high crystallinity close to diamond in electric resistance, light transmittance, hardness, etc. by heating diamond powder with laser or electron beams in a vacuum to form a diamondlike thin film on a substrate for vapor deposition and irradiating the thin film with ion. CONSTITUTION:Vacuum container 1 has window 3 for introducing laser beams 2, and in container 1 concave mirror 4, diamond powder 5 and substrate 6 for vapor deposition are arranged. Container 1 is first evacuated to a high vacuum, and laser beams 2 of 10W output are introduced from window 3, reflected by mirror 4, focused, and applied to powder 5. Thus, powder 5 is heated to several thousands deg.C, evaporated in the form of clusterlike molecules, and deposited on substrate 6 to form a diamondlike carbon film. By hitting an ion current accelerated to several tens eV with an ionic gun against substrate 6 in the deposition, diamond molecules may be brought to a locally equivalent high temp. high pressure state to form a carbon film. |
