| 摘要 |
<p>PURPOSE:To improve a specific resistance value and to lengthen the life of a head, by a method wherein, in a thermal head having a tantalum group film heater resistor, tantalum oxynitride is used as a heating resistor. CONSTITUTION:A film of a heating resistor 2 made of tantalumoxynitride [Ta2 (N.O)] is formed on a substrate 1 in which an electric insulation material, such as glaze glass, tantalum pentoxide, is coated on the surface of an aluminum base plate. An electric conductor 3 and a protection layer 4 are further formed thereon.</p> |
