| 摘要 |
PROBLEM TO BE SOLVED: To adjust an inspection threshold to an optimal value with less work in a short time without requiring a high-capacity storage.SOLUTION: An adjustment method includes the steps of: using a surface inspection device to perform surface inspection of a formation sample plate (S1); adjusting an inspection threshold so as to prevent formation from being detected erroneously as a defect (S2 and S3); fixing a correction level of a camera signal at a value used in the surface inspection of the formation sample plate (S4); using the surface inspection device to perform the surface inspection of a defective sample plate (S5); adjusting the inspection threshold so as to satisfy three conditions that the defect in the defective sample plate is detected, a difference between a defect size of an image obtained from the surface inspection of the defective sample plate and a known defect size of the defective sample plate becomes within a specified value &bgr;% and defect density in the image becomes a preliminarily specified value γ% or greater (S6 to S8 and S10 to S11); and performing the surface inspection of the formation sample plate again, and ending the adjustment of the inspection threshold in the case of no erroneous detection. |
