发明名称 SEMICONDUCTOR ASSEMBLING DEVICE
摘要 PURPOSE:To generate a ball surely when the ball is to be formed with a fine metal wire using the electric torch of a wire bonder being used to assemble the semiconductor element by a method wherein a voltage is applied after short-circuiting between the fine metal wire and the electric torch is detected preliminary. CONSTITUTION:The semiconductor element 8 is put on a die pad 9, and is connected to a lead wire 10 with the fine metal wire 6. When the electric torch 2 comes under a capillary chip 5 for the wire bonder holding the fine metal wire, a voltage being not so large as to generate a spark between the electric torch and the fine metal wire is applied to the cable. When the both are short-circuited, a current flows. This is checked with a current detector 2. When no current is flowing, the normal voltage to generate a spark is applied to form the ball 7. Accordingly wire bonding can be performed surely with favorable precision.
申请公布号 JPS56157040(A) 申请公布日期 1981.12.04
申请号 JP19800060296 申请日期 1980.05.07
申请人 MITSUBISHI ELECTRIC CORP 发明人 OOSETO JIROU
分类号 H01L21/60 主分类号 H01L21/60
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