| 摘要 |
PURPOSE:To elongate the life of a core tube for manufacture of the semiconductor device by a method wherein a substrate holding jig having a semiconductor substrate to be processed mounted thereon facing to the axial direction of the tube is hanged down vertically in the furnace core tube of a vertical type heating device and heated. CONSTITUTION:A substrate holder being fitted with the semiconductor substrates 3 to be processed is put on a support 7 of the substrate holding jig consisting of the support 7, a ring shaped frame 8, a centering tube 9, a substrates pressing bar 14, an exhaust tube 5, a substrates pressing bar inserting hole 12 and a cover 6 for the core tube, and the jig is hanged vertically in the core tube, and heat-treatment is performed. Accordingly, because friction between the both to be generated when the jig is taken in and out from the core tube is almost eliminated, the life of the core tube is elongated, and the generation of qeuartz powder can be eliminated to prevent contamination of the substrates to be processed. |
