| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a vapor-deposited film using a vacuum vapor deposition system where a mixed film composed of different elements and having a predetermined composition and film thickness is formed stably and continuously for a long time at a high level on the surface of a long-sized film.SOLUTION: A manufacturing method of a vapor-deposited film using a vacuum vapor deposition system that includes material holding means 8 for holding at least two or more different kinds of vapor deposition material in a vacuum chamber, equipped with a partition section 13 for separating the vapor deposition materials, and heating means for heating and evaporating the vapor deposition materials, and forms an inorganic thin film on a film traveling in the vacuum chamber. The heat-transfer coefficient of the partition section 13 in the direction vertical to partition is two or more times the heat-transfer coefficient in the partition direction.SELECTED DRAWING: Figure 2 |
