发明名称 METHOD AND COATING ARRANGEMENT
摘要 According to various embodiments, a method (100a, 200a, 700, 800) can comprise the following steps: transporting a film structure (302) in a coating area in a vacuum chamber, the film structure (302) having a thickness of less than 40 µm; and coating the film structure (302) using a gaseous coating material.
申请公布号 WO2016174033(A1) 申请公布日期 2016.11.03
申请号 WO2016EP59282 申请日期 2016.04.26
申请人 VON ARDENNE GMBH 发明人 VIELUF, Maik
分类号 C23C14/24;C23C14/06;C23C14/56;H01M4/04;H01M4/1395;H01M4/66 主分类号 C23C14/24
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