Inspecting apparatus for inspecting a multilayer structure

摘要

An inspecting apparatus includes: a stage including a top surface on which a multilayer structure comprising a first layer and a second layer is placed; a first light irradiation unit which faces a first side surface of the multilayer structure and provides light to a first side surface of the first layer or a first side surface of the second layer; an image capture unit which is on the stage, receives scattered light from the multilayer structure and generates image information of the multilayer structure from the received scattered light, and a control unit which detects foreign body information of the multilayer structure based on the image information of the multilayer structure. The scattered light comprises the light which is provided from the first light irradiation unit and is scattered within the multilayer structure.

主权项

1. An inspecting apparatus comprising:
a stage comprising a top surface on which a multilayer structure comprising a first layer and a second layer in different planes along a thickness direction of the multilayer structure is placed; a first light irradiator which faces a first side surface of the multilayer structure and comprises:
a first light source which generates light and is extended to simultaneously emit the light in the different planes along the thickness direction of the multilayer structure,whereinfor the first and second layers in different planes along the thickness of the multilayer structure, the first light irradiator selectively provides the light from the first light source to one among a plane in which a first side surface of the first layer is disposed and a plane in which a first side surface of the second layer is disposed, andthe light provided to the multilayer structure is scattered therein to generate scattered light; an image detector which is on the multilayer structure placed on the stage, receives the scattered light from the multilayer structure and generates image information of the multilayer structure from the received scattered light; and a controller which is connected to the image detector and configured to determine foreign body information of the multilayer structure from the image information of the multilayer structure which is generated by the image detector.