发明名称 HEAT TREATING JIG
摘要 PURPOSE:To reduce the wear of a heat treating jig by forming the jig of graphite and forming the part contacting with a part to be treated made of BN. CONSTITUTION:A recess 4 to which a metallic outer ring 1 can be inserted and a hole 43 to which a lead wire 3 is inserted at the center of the bottom are provided on the upper surface of a graphite body 41, and a BN layer 44 is formed on the entire surface. A bottom plate 45 is formed of graphite, and the entire surface is covered with BN. Thus, the wear is remarkably reduced when the lead wire and metallic outer ring is inserted and removed, thereby increasing the lifetime of the jig. Further, the contamination of the surface of the glass 2 due to the graphite powder can be eliminated.
申请公布号 JPS5726460(A) 申请公布日期 1982.02.12
申请号 JP19800102063 申请日期 1980.07.24
申请人 NIPPON ELECTRIC CO 发明人 FUKUMA ZENICHI
分类号 C04B41/87;C03C29/00;H01L21/50;H01L21/673;H01L23/12;H01L23/48;H01L23/50 主分类号 C04B41/87
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