| 摘要 |
PURPOSE:To increase an open-circuit voltage of a solar cell and also make its characteristic stabilized thermally by a method wherein a specific material such as CdSnO3-x(0<=x<1) having a composition ratio within a fixed range is used for a transparent electrode of a light input side of the solar cell consisting of a semiconductor thin film. CONSTITUTION:A transparent electrode 12 approximately 2,000Angstrom thick is formed on a transparent substrate 11 made of, for example, glass by means of a sputtering method, and a PIN structure, for instance, amorphous silicon layer 13 is deposited on the electrode 12 by means of a plasma CVD method. Then, an Al electrode 14 is deposited to constitute a solar cell. For the material of this transparent electrode 12, at least one of CdSnO3-x(0<=x<1), Cd2SnO4-x(0<=x<1) and CdSn1-xSbxO4(0<=x<1) is used. With this structure, an output can be increased because the open-circuit voltage can be increased, and also deterioration of the characteristic due to high-temperature processing can be prevented. Application of amorphous silicon for the semiconductor thin film provides large improvement of the characteristic. |
