| 摘要 |
PURPOSE:To determine the concn. of an object to be examined accurately in a short time with good efficiency by operating the relational curve of the sample concn. value of a reference concn. pattern and a reference concn. value approximately, and correcting the concn. value of the object to be examined with the approximate formula signal thereof. CONSTITUTION:An image 11 of an object to be examined and an image 12 of a reference concn. pattern are photographed simultaneously on a sample 13 to be measured. In a concn. measuring part U1, these images are measured and the signals of the sample concn. value X of the pattern and the concn. value X1 of the image of the object to be examined are outputted. In a proximate operating part U3, the relational curve of the sample concn. value X and the reference concn. value y obtd. by measuring directly the concn. of the reference concn. pattern itself from a reference concn, value setting part U2 is approximately operated, and an approximate formula signal is outputted. In an correction operating part U4, the concn. value Xj of the image 11 is corrected by the above- mentioned approximate formula signal, and the actual concn. value Yj is outputted. Thereby, the concn. of the object to be examined is measured accurately in a short time. |
