| 摘要 |
PURPOSE:To make the thickness of the films formed on the work uniform by providing a grating-like member of different densities between one of the surfaces of a target and the work. CONSTITUTION:If gaseous Ar is introduced into a chamber 1 and air is released therefrom, glow discharge takes place between a holder 2 and a metallic part 5, and gaseous Ar plasma is generated, then Ar<+> collides against a target 3, and sputters, for example, Cr atoms. Since a magnet 6 is provided radially to a circular holder 2, the magnetic field is strongest in the central part of the magnet 6. The Ar<+> collides most against the target 3 in this part and sputters Cr atoms much. Therefore, the many Cr atoms scattered by the dense parts 8' of a grating-like member 8 provided between the target 3 and the work 4 are suppressed, whereby the film thickness of the Cr films 3' stuck on the work is made uniform. |
