发明名称 ASPHERICAL NULL MIRROR INTERFEROMETER
摘要 The purpose of the present invention is to provide an aspherical null mirror interferometer able to reliably discover mistakes in the installation angle and installation location of an aspherical null mirror and the installation angle and installation location of a test lens. The aspherical null mirror interferometer has the aspherical null mirror, in which a flat surface orthogonal to the axis of the aspherical surface is provided to a portion of the aspherical null mirror. The angle of the aspherical null mirror is adjusted, with the test lens having been removed, using returning reflected light from a flat surface mirror of the aspherical null mirror. The test lens, in which the flat surface orthogonal to the optical axis of the test lens is provided to a portion of the test lens, is used to adjust the angle of the test lens using the returning reflected light from the flat surface mirror of the test lens.
申请公布号 WO2016208083(A1) 申请公布日期 2016.12.29
申请号 WO2015JP68596 申请日期 2015.06.23
申请人 KIYOHARA OPTICS INC. 发明人 KIYOHARA, Motosuke;NOGUCHI, Masato;KIYOHARA, Kousuke
分类号 G01M11/00 主分类号 G01M11/00
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