| 摘要 |
PURPOSE:To eliminate temperature fluctuations in a precision machine, for example, an electron beam exposure apparatus and stably draw a picture, by providing a heat exchanger in the middle of pipe arrangement for supplied air to keep the temperature of air constant. CONSTITUTION:Air to be used for an air bearing passes through a compressor 1, an after cooler 3, a filter 4, an air tank 5 and an air driver 8 to be dehumidified and purified. This air is kept a fixed temperature by heat exchange with homoiothermal water controlled to be a fixed temperature by a circulator 14 by an adiabatic heat exchanger 13 from an air control panel 12. The air is supplied through an adiabatic tube 15 to a precision machine 16. |
