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发明名称
VAPOR DEPOSITING METHOD OF GASEOUS FILM
摘要
申请公布号
JPS5825473(A)
申请公布日期
1983.02.15
申请号
JP19810121935
申请日期
1981.08.05
申请人
HITACHI SEISAKUSHO KK
发明人
INAO KIYOHISA
分类号
H01J9/233;C23C14/04;C23C14/06
主分类号
H01J9/233
代理机构
代理人
主权项
地址
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