| 摘要 |
PURPOSE:To obtain a photoconductive material suitable for electrophotography, etc. and superior in durability, etc., by successively forming on a substrate an auxiliary layer, a charge injection preventive layer, first and second amorphous layers, each layer being made of amorphous material consisting mainly of Si. CONSTITUTION:Layers 102, 103, 104, 105 formed on a substrate 101 are made of an amorphous material consisting mainly of Si. An auxiliary layer 102 is formed on the substrate 101 and consisits mainly of Si, and up to 25 atomic % N and H. On this layer a charge injection preventive layer 103 is formed and consists mainly of Si and an atom of group V of the periodic table, such as As. On this layer 103, a first photoconductive amorphous layer 104, and a second amorphous alyer 105 consisting of Si, C, and halogen are formed in due order, thus forming an objective photoconductive material 100. |
