摘要 |
PURPOSE:To obtain a photoconductive material suitable for electrophotography, etc. and superior in light fatigue resistance and durability, etc., by successively forming on a substrate, an auxiliary layer, a charge injection preventive layer, an amorphous layer, each layer made of an amorphous material consisting mainly of Si. CONSTITUTION:Layers formed on a substrate 101 are all made of amorphous material consisting mainly of Si. An auxiliary layer 102 composed of H and N up to 25 atomic % besides Si is formed by the glow discharge or sputtering method, or the like. ON this layer 102, a charge injection preventive layer 103 is formed by the glow discharge method, etc. and consists of Si and an atom of group V of the periodic table, such as P or As. On this layer, an amorphous layer 104 is formed and it contains a substance for controlling coductivity characteristics, such as A or Ga, thus obtaining an objective photoreceptor 100. |