| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology that achieves reducing of processing liquid to be consumed for removing air bubbles from a filter part when a novel filter part is mounted in a processing liquid supply path, and shortening of startup time.SOLUTION: A method performs the steps of: filling the inside of a novel filter part with processing liquid; then making the inside of the filter part be a first pressure atmosphere which is a negative pressure atmosphere, in order to remove air bubbles from the filter part; then boosting the inside of the filter part; thereafter, making the processing liquid pass from a primary side of the filter part to the filter part while making a secondary side of the filter part be a second pressure atmosphere higher than the first pressure atmosphere; and performing liquid processing by supplying the processing liquid which has passed through the filter part, through a nozzle to an object to be processed. Thus, the air bubbles can be speedily removed.SELECTED DRAWING: Figure 1 |
