| 摘要 |
PURPOSE:To improve the conversion efficiency of the titled solar battery by a method wherein, in the composition of the transparent conductive film of In2O3+SnO2, SnO2 is increased as going away from the substrate, and an SnO2 film is formed on the side which comes in contact with an amorphous silicon P- I-N structure. CONSTITUTION:The grain-like material mixed at the rate of In2O3: SnO2=95:5 is put in a crucible to be used for electron beam, a transparent conductive film 2 is formed on a glass substrate 1 by performing a vapor-deposition, and an SnO2 film is formed by vapor-depositing SnO2 grains. After an a-Si film (or an a-SiO film) 4 containing boron, an a-Si film (I layer) 5 and an a-Si film N layer) 6 containing phosphorus have been formed using CVD method, an Al electrode 6 is formed. According to this constitution, the voltage and current characteristics of the titled solar battery can be improved when compared with an In2O+SnO2 transparent conductive film and an SnO2 transparent conductive film. |
